Bis(tert-butylamino)silane
Electronics Ultra-Pure
Electronics Chemical

Bis(tert-butylamino)silane (BTBAS)

Premium electronics grade BTBAS manufactured to meet stringent semiconductor industry specifications for CVD applications. Provides exceptional performance as a silicon nitride precursor with ultra-high purity and consistent quality for advanced semiconductor manufacturing processes.

  • Electronics Grade Purity
  • Silicon Nitride Precursor
  • CVD Compatible
  • Ultra-Low Contamination
  • Consistent Deposition Quality
  • Advanced Semiconductor Processing
Request Quote Technical Support

Technical Specifications

Chemical Name: Bis(tertiary-butyl amino) silane
Chemical Formula: [(CH₃)₃CNH]₂SiH₂
CAS Number: 128446-35-5
Concentration (Assay): 99.9% min (Electronic Grade)
Physical State: Clear, colorless liquid
Molecular Weight: 202.39 g/mol
Boiling Point: 65°C (at 10 mmHg)
Melting Point: -25°C
Density (20°C): 0.79 g/cm³
Vapor Pressure (20°C): 0.5 Torr
Water Content: ≤ 10 ppm
Metal Impurities: ≤ 0.1 ppm each
Carbon Content: 47.5-48.5%
Nitrogen Content: 13.8-14.2%
Silicon Content: 13.8-14.2%
Particle Count: ≤ 100 per mL (≥0.5μm)
Packaging Options: 100mL, 500mL stainless steel cylinders

Applications

Silicon Nitride CVD
Semiconductor Processing
PECVD Processes
Thin Film Deposition
Dielectric Formation
Gate Insulator
Quality Control
Research Applications
Passivation Layers
Academic Research
Process Development
Materials Engineering

Industry-Specific Grades

DRAVYOM offers specialized BTBAS grades tailored for specific CVD requirements, ensuring optimal silicon nitride deposition performance and regulatory compliance across diverse semiconductor applications.

Electronic Grade
Purity: 99.9% min Water: ≤ 10 ppm Total Metals: ≤ 0.1 ppm Application: CVD processes
Ultra-Pure Grade
Purity: 99.99% Water: ≤ 5 ppm Particles: ≤ 50 per mL Application: PECVD processes
Research Grade
Purity: 99.5% Water: ≤ 20 ppm Small Volumes: Available Application: R&D applications
CVD Grade
Purity: 99.99% Controlled Volatility Low Particles Application: CVD deposition

Quality Standards

DRAVYOM's Electronic Grade BTBAS is manufactured under stringent quality control protocols, meeting international electronic industry standards including SEMI, JEIDA, and ISO specifications. Our production ensures consistent CVD performance and regulatory compliance.

ISO 9001:2015 Certified Manufacturing
SEMI Standards Compliance
99.9% Electronic Grade Purity
Advanced Chemical Analysis
Ultra-Low Metal Contamination
Batch-to-Batch Consistency
Complete Certificate of Analysis
Controlled Storage & Delivery

Advanced Chemical Properties & Performance

Electronic Grade BTBAS exhibits exceptional chemical properties essential for semiconductor applications. The ultra-pure composition and controlled volatility ensure reliable performance in demanding electronic manufacturing processes.

Chemical Properties
Purity Level: 99.99% (4N)
Moisture Content: ≤ 5 ppm
Volatility: Controlled thermal stability
Decomposition Products: Controlled Si₃N₄ formation
Physical Properties
Boiling Point: 234°C
Melting Point: -75°C
Vapor Pressure (20°C): 2.1 kPa
Density (25°C): 0.79 g/cm³
Process Performance
Deposition Rate: Controlled and uniform
Film Quality: High-quality Si₃N₄ films
Temperature Window: 550-750°C optimal range
Conformality: Excellent step coverage
Purity Specifications
Total Metallic Impurities: ≤ 1 ppm
Oxygen Content: ≤ 10 ppm
Chloride Content: ≤ 1 ppm
Particle Count: ≤ 100 (>0.5µm)/mL
Stability Properties
Shelf Life: 12 months (sealed container)
Storage Temperature: 15-25°C
Thermal Stability: Stable to 200°C
Container Compatibility: Stainless steel, PTFE-lined

Performance Characteristics

Detailed performance metrics demonstrate Electronic Grade BTBAS superiority in semiconductor applications with exceptional purity, process reliability, and consistent film deposition.

Ultra-High Purity

99.99% purity guaranteed

Essential for critical CVD processes
CVD Performance

Uniform Si₃N₄ film deposition

Consistent film quality
Process Control

Temperature range: 550-750°C

Wide process window
Batch Consistency

Variation: ±0.1% between lots

Exceptional lot-to-lot uniformity
Film Quality

Excellent step coverage

Superior conformality
Storage Stability

12-month shelf life

Extended operational availability

Safety Information

Potentially hazardous liquid that may cause respiratory and skin irritation. Handle in well-ventilated areas with appropriate protective equipment including chemical-resistant gloves, safety goggles, and protective clothing. Ensure emergency procedures are in place.

Irritant
Respiratory Irritant
Eye Irritant

Storage & Handling

Store in original stainless steel or PTFE-lined containers in a cool, dry, well-ventilated area away from moisture and heat sources. Keep containers tightly sealed and protect from temperature extremes. Use appropriate handling equipment for liquid transfer.

Cool storage (15-25°C)
Good ventilation required
Sealed containers only
Protect from moisture

Chemical Mechanisms & Reaction Pathways

Electronic Grade BTBAS exhibits organosilicon deposition properties through controlled hydrolysis and polymerization mechanisms, enabling precise semiconductor processing applications with predictable film formation and controlled barrier layer deposition.

Hydrolysis Mechanism

Controlled hydrolysis and condensation for silica barrier formation

Precise barrier layer formation for semiconductor devices
Polymerization

Controlled polymerization for uniform film deposition

Essential for consistent barrier layer properties
CVD Processing

Chemical vapor deposition for thin film formation

Enables precise electronic material deposition
Barrier Formation

Controlled barrier layer formation for device isolation

Critical for advanced semiconductor fabrication

Regulatory Compliance & Documentation

Comprehensive regulatory compliance ensures global semiconductor manufacturing access with complete documentation packages supporting international standards and electronic-grade specifications.

SEMI Standards

Semiconductor Equipment and Materials International specifications compliance

ISO 9001:2015

International quality management system certification

Electronic Grade

Ultra-pure specifications for semiconductor manufacturing

REACH Registration

European Union chemical regulation compliance

Process Validation

Supported semiconductor process validation documentation

SDS Documentation

Multi-language Safety Data Sheets (16 sections, GHS compliant)

Technical Support & Value-Added Services

DRAVYOM's semiconductor chemistry team provides comprehensive process support, troubleshooting assistance, and engineering services to optimize Electronic Grade BTBAS performance in your specific manufacturing applications.

Process Development
  • Semiconductor process optimization support
  • Deposition procedure guidance
  • Process reliability validation
  • Custom precursor procedures
Analytical Services
  • Certificate of Analysis verification
  • Custom purity analysis
  • Trace organosilicon contamination testing
  • Process validation support
Technical Support
  • Process troubleshooting consultation
  • Storage and handling guidance
  • Safety training and protocols
  • Manufacturing best practices
Supply Solutions
  • Consistent batch scheduling
  • Emergency supply arrangements
  • Custom packaging options
  • Global distribution network

Environmental Impact & Sustainability

Our Electronic Grade BTBAS production emphasizes environmental responsibility through sustainable manufacturing practices, waste minimization, and comprehensive environmental impact management for semiconductor operations.

Waste Minimization

Optimized production with minimal waste generation

Water Treatment

Advanced wastewater treatment and recycling systems

Clean Production

Energy-efficient synthesis with emission controls

Safe Disposal

Comprehensive guidance for manufacturing waste management

ISO 14001

Environmental management system certified production

Container Recycling

Chemical container return and recycling programs

Manufacturing Excellence & Quality Control

DRAVYOM's state-of-the-art semiconductor chemical manufacturing facility employs advanced purification technology and continuous monitoring systems to ensure consistent Electronic Grade BTBAS quality and performance across all production batches.

Production Process

Advanced synthesis and purification in controlled atmosphere

Ultra-pure organosilicon precursor production
Quality Testing

Comprehensive analytical testing protocol including trace metals and organics

NMR spectroscopy and GC-MS analysis
Quality Systems

ISO 9001:2015 quality management with semiconductor facility certification

Continuous improvement and process validation
Packaging Control

Specialized containers with moisture and air exclusion

Moisture-free storage and contamination prevention

Market Applications & Performance Data

Comprehensive semiconductor manufacturing data demonstrating Electronic Grade BTBAS effectiveness across diverse applications with quantified performance metrics and process validations.

Barrier Layer Formation
Precision: ±0.1% film thickness control Purity: >99.99% electronic grade Yield: 99.6%+ process success
CVD Processing
Efficiency: 99.8%+ deposition uniformity Selectivity: High process selectivity Reliability: 100% batch consistency
Semiconductor Fabrication
Performance: Zero defect contribution Validation: 100% process qualification Efficiency: 25% faster processing

DRAVYOM Competitive Advantages

Superior Purity

Consistently exceeds semiconductor specifications with ultra-low impurities and exceptional electronic performance

Reliable Supply

Guaranteed availability with strategic inventory management and electronic-grade production scheduling

Process Expertise

Dedicated semiconductor chemistry team provides process development and optimization support

Quality Assurance

Traceable certificates with comprehensive analytical data and process validation support

Global Standards

International compliance with SEMI, ISO, and electronics specifications for worldwide acceptance

Partnership Approach

Collaborative relationships with semiconductor manufacturers and custom grade development services