Boron Trichloride
Electronics Ultra-Pure
Electronics Chemical

Boron Trichloride (BCl3)

Premium electronics grade Boron Trichloride manufactured to meet stringent semiconductor industry specifications for etching and plasma processing. Provides exceptional gas purity and consistency with ultra-high quality control for advanced semiconductor manufacturing processes.

  • Electronics Grade Purity
  • Precision Etching Gas
  • Plasma Processing Compatible
  • Ultra-Low Contamination
  • Consistent Gas Quality
  • Advanced Semiconductor Processing

Technical Specifications

Chemical Formula: BCl₃
CAS Number: 10294-34-5
UN Number: UN 1741 (Toxic gas)
Concentration (Assay): 99.99% min (Electronic Grade)
Physical State: Compressed gas
Molecular Weight: 117.17 g/mol
Boiling Point: 12.6°C
Melting Point: -107.3°C
Vapor Pressure (20°C): 143 kPa
Water Content: ≤ 2 ppm
Oxygen (O₂): ≤ 1 ppm
Nitrogen (N₂): ≤ 5 ppm
Carbon Dioxide (CO₂): ≤ 1 ppm
Carbon Monoxide (CO): ≤ 0.5 ppm
Metal Impurities: ≤ 0.01 ppm each
Sulfur (S): ≤ 0.1 ppm
Packaging Options: Gas cylinders, Lecture bottles

Applications

Ion Implantation
Semiconductor Doping
Plasma Etching
CVD Processes
Boron Deposition
Epitaxial Growth
Quality Control
Research Applications
Materials Research
Academic Research
Process Development
Gas Analysis

Industry-Specific Grades

DRAVYOM offers specialized boron trichloride grades tailored for specific semiconductor manufacturing requirements, ensuring optimal doping performance and regulatory compliance across diverse electronic applications.

Electronic Grade
Purity: 99.99% min Water: ≤ 2 ppm Total Metals: ≤ 0.01 ppm Application: Ion implantation
Ultra-High Purity
Purity: 99.999% Water: ≤ 1 ppm O₂ + Ar: ≤ 0.5 ppm Application: CVD processes
Research Grade
Purity: 99.9% Water: ≤ 5 ppm Small Volumes: Available Application: R&D applications
Plasma Grade
Purity: 99.999% Particles: Ultra-low Stable Flow: Yes Application: Plasma etching

Quality Standards

DRAVYOM's Electronic Grade Boron Trichloride is manufactured under stringent quality control protocols, meeting international electronic industry standards including SEMI, JEIDA, and ISO specifications. Our production ensures consistent performance and regulatory compliance with strict safety protocols.

ISO 9001:2015 Certified Manufacturing
SEMI Gas Standards Compliance
99.99% Electronic Grade Purity
Advanced Gas Analysis
Ultra-Low Impurity Levels
Cylinder-to-Cylinder Consistency
Complete Certificate of Analysis
Safe Handling & Delivery

Advanced Chemical Properties & Performance

Electronic Grade Boron Trichloride exhibits exceptional chemical properties essential for semiconductor applications. The ultra-pure composition and precise gas handling ensure reliable performance in demanding electronic manufacturing processes.

Gas Properties
Purity Level: 99.99% (4N)
Moisture Content: ≤ 1 ppm
Oxygen (O₂): ≤ 0.5 ppm
Total Hydrocarbons: ≤ 0.1 ppm
Physical Properties
Boiling Point: 12.6°C
Melting Point: -107.3°C
Vapor Pressure (20°C): 150 kPa
Molecular Weight: 117.17 g/mol
Process Performance
Etching Rate: Controlled and uniform
Selectivity: High material selectivity
Plasma Stability: Excellent plasma stability
Process Window: Wide operational range
Purity Specifications
Total Impurities: ≤ 100 ppm
Carbon Dioxide: ≤ 1 ppm
Nitrogen (N₂): ≤ 10 ppm
Metallic Impurities: ≤ 0.1 ppm each
Stability Properties
Shelf Life: 2 years (unopened cylinder)
Storage Pressure: 10-15 bar @ 20°C
Temperature Range: -40°C to +60°C
Cylinder Material: Stainless steel, passivated

Performance Characteristics

Detailed performance metrics demonstrate Electronic Grade Boron Trichloride superiority in semiconductor applications with exceptional purity, process reliability, and consistent gas delivery.

Ultra-High Purity

99.99% purity guaranteed

Essential for plasma etching
Etching Performance

Uniform etch rates

Consistent material removal
Process Reliability

Stable across temperature ranges

Consistent across process conditions
Cylinder Consistency

Variation: ±0.01% between cylinders

Exceptional batch-to-batch control
Plasma Performance

Excellent plasma stability

Enhanced process control
Supply Reliability

2-year shelf life guaranteed

Extended operational availability

Safety Information

Highly toxic and corrosive gas that reacts with moisture to form hydrochloric acid. Handle in well-ventilated areas with appropriate gas detection systems, protective equipment including full-face respirator, chemical-resistant clothing. Ensure emergency procedures and gas leak detection are in place.

Toxic Gas
Corrosive
Water Reactive

Storage & Handling

Store cylinders in a cool, dry, well-ventilated area away from moisture and incompatible materials. Use appropriate gas handling equipment with leak detection systems and moisture control. Ensure proper cylinder securing and pressure regulation systems.

Cool storage (≤30°C)
Excellent ventilation required
Gas leak detection systems
Dry atmosphere preferred

Chemical Mechanisms & Reaction Pathways

Electronic Grade Boron Trichloride exhibits Lewis acid properties and plasma etching capabilities through controlled ionization and radical formation, enabling precise semiconductor processing applications with predictable etching pathways and controlled material removal.

Plasma Reactions

Controlled ionization: BCl₃ → BCl₂⁺ + Cl⁻ + e⁻ in plasma state

Generates reactive species for semiconductor etching
Etching Mechanism

Selective material removal through chemical and physical processes

Essential for precise semiconductor patterning
Lewis Acid Behavior

Electron pair acceptance for complex formation

Enables controlled chemical transformations
Anisotropic Etching

Directional etching for precise pattern transfer

Critical for advanced device fabrication

Regulatory Compliance & Documentation

Comprehensive regulatory compliance ensures global semiconductor manufacturing access with complete documentation packages supporting international standards and electronic-grade specifications.

SEMI Standards

Semiconductor Equipment and Materials International specifications compliance

ISO 9001:2015

International quality management system certification

Electronic Grade

Ultra-pure specifications for semiconductor manufacturing

REACH Registration

European Union chemical regulation compliance

Process Validation

Supported semiconductor process validation documentation

SDS Documentation

Multi-language Safety Data Sheets (16 sections, GHS compliant)

Technical Support & Value-Added Services

DRAVYOM's semiconductor chemistry team provides comprehensive process support, troubleshooting assistance, and engineering services to optimize Electronic Grade Boron Trichloride performance in your specific manufacturing applications.

Process Development
  • Semiconductor process optimization support
  • Etching procedure guidance
  • Process reliability validation
  • Custom gas mixture procedures
Analytical Services
  • Certificate of Analysis verification
  • Custom purity analysis
  • Trace chloride contamination testing
  • Process validation support
Technical Support
  • Process troubleshooting consultation
  • Storage and handling guidance
  • Safety training and protocols
  • Manufacturing best practices
Supply Solutions
  • Consistent batch scheduling
  • Emergency supply arrangements
  • Custom packaging options
  • Global distribution network

Environmental Impact & Sustainability

Our Electronic Grade Boron Trichloride production emphasizes environmental responsibility through sustainable manufacturing practices, waste minimization, and comprehensive environmental impact management for semiconductor operations.

Waste Minimization

Optimized production with minimal waste generation

Water Treatment

Advanced wastewater treatment and recycling systems

Clean Production

Energy-efficient synthesis with emission controls

Safe Disposal

Comprehensive guidance for manufacturing waste management

ISO 14001

Environmental management system certified production

Container Recycling

Chemical container return and recycling programs

Manufacturing Excellence & Quality Control

DRAVYOM's state-of-the-art semiconductor chemical manufacturing facility employs advanced purification technology and continuous monitoring systems to ensure consistent Electronic Grade Boron Trichloride quality and performance across all production batches.

Production Process

Advanced synthesis and purification in controlled atmosphere

Ultra-pure gas generation for electronic applications
Quality Testing

Comprehensive analytical testing protocol including trace metals and impurities

Mass spectrometry and gas chromatography analysis
Quality Systems

ISO 9001:2015 quality management with semiconductor facility certification

Continuous improvement and process validation
Packaging Control

Specialized pressure containers with advanced safety systems

Ultra-secure containment for hazardous materials

Market Applications & Performance Data

Comprehensive semiconductor manufacturing data demonstrating Electronic Grade Boron Trichloride effectiveness across diverse applications with quantified performance metrics and process validations.

Plasma Etching
Precision: ±0.02% etch control Purity: >99.9999% electronic grade Yield: 99.9%+ process success
Semiconductor Processing
Efficiency: 99.95%+ etching uniformity Selectivity: Ultra-high etch selectivity Reliability: 100% batch consistency
Device Fabrication
Performance: Zero defect contribution Validation: 100% process qualification Efficiency: 45% faster processing

DRAVYOM Competitive Advantages

Superior Purity

Consistently exceeds semiconductor specifications with ultra-low impurities and exceptional electronic performance

Reliable Supply

Guaranteed availability with strategic inventory management and electronic-grade production scheduling

Process Expertise

Dedicated semiconductor chemistry team provides process development and optimization support

Quality Assurance

Traceable certificates with comprehensive analytical data and process validation support

Global Standards

International compliance with SEMI, ISO, and electronics specifications for worldwide acceptance

Partnership Approach

Collaborative relationships with semiconductor manufacturers and custom grade development services